Self-compensation to build reconfigurable measurement systems, in IEEE Instrumentation & measurement Magazine April 2013.
Papers from TU Eindhoven and ASML in IEEE Transactions on Control Systems Technology May 2013:
- Time Delay Compensation in Bilateral Teleoperations Using IMPACT, by Alper Denasi, et al. with TU Eindhoven.
- Switching Control in Vibration Isolation Systems, by Marcel Heertjes, et al. with TU Eindhoven and ASML.
- Adaptive Feedforward for a Wafer Stage in a Lithographic Tool, by Hans Butler with ASML.